TY  - BOOK
AU  - SMITH DONALD
TI  - THIN-FILM DEPOSITION: PRINCIPLES AND PRACTICE
SN  - 07-058502-4
AV  - TA 418.9.T45S65 1995 
PY  - 1995///
CY  - NEWYORK
PB  - MCGRAW-HILL
KW  -  Thin films. Vapor-plating. Thin film devices
N1  - INCLUDES APPENDIX AND INDEX
ER  -